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ITRS 2013 EDITION SUMMARY
  2013 Executive Summary and Acknowledgments
  2013 Overall Roadmap Technology Characteristics (ORTC) Table
 

Link to 2013 Edition Full Version


  ITRS REPORTS' SUMMARIES
  System Drivers
  Front End of Line Topics
    Process Integration, Devices, and Structures (PIDS)
    RF and Analog/Mixed-signal Technologies (RFAMS)
    Lithography
    Front End Processes (FEP)
    Emerging Research Devices (ERD)
    Emerging Research Materials (ERM)
  Back End of Line Topics
    Interconnect
    Test and Test Equipment
    Assembly & Packaging
    Micro-Electro-Mechanical Systems (MEMS)
Enabling Technologies
    Design
    Modeling & Simulation
    Factory Integration
    Environment, Safety & Health (ESH)
    Metrology
    Yield Enhancement
 

ITRS TABLES' SUMMARIES

  System Drivers
  Front End of Line Topics
    Process Integration, Devices, and Structures (PIDS)
    RF and Analog/Mixed-signal Technologies (RFAMS)
    Lithography
    Front End Processes (FEP)
    Emerging Research Devices (ERD)
    Emerging Research Materials (ERM)
  Back End of Line Topics
    Interconnect
    Test and Test Equipment
    Assembly & Packaging
    Micro-Electro-Mechanical Systems (MEMS)
  Enabling Technologies
    Design
  Modeling & Simulation
  Factory Integration
    Environment, Safety & Health (ESH)
    Metrology
    Yield Enhancement
      
    ~~BACK TO PAGE TOP~~

 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.